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Proceedings Paper

CCD probe: application of linear array CCD in large-dimension measurement
Author(s): Qun Hao; Mang Cao; Yang Zhao; Dacheng Li
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Paper Abstract

A research on using linear array CCD detecting technique in measuring form and position errors of large scale dimension is described in this paper. The basic idea of this kind of measurement is that using a stable aligned laser beam incident on a 1D asymmetrical phase plate to form a black line as the reference of the beam, form and position datum lines and planes can be established through a scanner. A linear array CCD is used to measure deviation between the datum and the quantity be measured directly and absolutely. In the paper, we also discuss the reading error of the CCD probe caused by various factors in detail and introduce the CCD probe and its signal processing circuit. Some of experiment results and its application are shown.

Paper Details

Date Published: 7 July 1997
PDF: 5 pages
Proc. SPIE 3174, Videometrics V, (7 July 1997); doi: 10.1117/12.279797
Show Author Affiliations
Qun Hao, Tsinghua Univ. (China)
Mang Cao, Tsinghua Univ. (China)
Yang Zhao, Tsinghua Univ. (United States)
Dacheng Li, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 3174:
Videometrics V
Sabry F. El-Hakim, Editor(s)

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