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Proceedings Paper

Interface reaction characterization and interfacial effects in multilayers
Author(s): Troy W. Barbee Jr.; Mark A. Wall
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Paper Abstract

The performance of multilayer structures as x-ray, soft x-ray and extreme ultraviolet optics is dependent on the nature of the interfaces between constituent layers. Interfacial structure and the interaction between atoms at interfaces has also been demonstrated to have significant impact on the physical properties of multilayer materials in general and thus on their performance in other applied areas. A short summary of the approaches to characterization of interfaces in multilayer structures is presented as background. Two new techniques for the experimental evaluation of interfacial structure and interfacial structure effects are then considered and examples presented. The paper is concluded with review of these results and an assessment of their implications relative to multilayer development.

Paper Details

Date Published: 11 July 1997
PDF: 10 pages
Proc. SPIE 3113, Grazing Incidence and Multilayer X-Ray Optical Systems, (11 July 1997); doi: 10.1117/12.278849
Show Author Affiliations
Troy W. Barbee Jr., Lawrence Livermore National Lab. (United States)
Mark A. Wall, Lawrence Livermore National Lab. (United States)

Published in SPIE Proceedings Vol. 3113:
Grazing Incidence and Multilayer X-Ray Optical Systems
Richard B. Hoover; Arthur B. C. Walker II, Editor(s)

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