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Proceedings Paper

Multipoint displacement probe combining a microlens array with an acousto-optic deflector scanner
Author(s): LiJiang Zeng; Hirokazu Matsumoto; Keiji Kawachi
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Paper Abstract

A multi-point dynamic displacement probe was developed for measuring dynamic displacement and deformation. This method uses an acousto-optic deflector (AOD) as a diffractive scanner to allow the laser beam to scan a self-focusing microlens array (SMLA), and then uses the resulting focused spot to scan the diffuse surface. The focus information contained in the laser beam reflected from the diffuse surface is then transformed into the variations in shape of spot for detection. Due to the very high scanning speed of the AOD, the relative position of many points, and thus the dynamic deformation, can be measured in near real-time. This paper describes the method's principles, accuracy, and error sources.

Paper Details

Date Published: 7 July 1997
PDF: 8 pages
Proc. SPIE 3131, Optical Scanning Systems: Design and Applications, (7 July 1997); doi: 10.1117/12.277747
Show Author Affiliations
LiJiang Zeng, Japan Science and Technology Corp. (China)
Hirokazu Matsumoto, National Research Lab. of Metrology (Japan)
Keiji Kawachi, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 3131:
Optical Scanning Systems: Design and Applications
Leo Beiser; Stephen F. Sagan, Editor(s)

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