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Proceedings Paper

Preliminary study of the influence of Grashof and Reynolds numbers on the flow and heat transfer in an MOCVD reactor
Author(s): Mark Kannapel; Samuel A. Lowry; Anantha Krishnan; Ivan O. Clark; Paul V. Hyer; Edward J. Johnson Jr.
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Paper Abstract

The combined effect of Grashof and Reynolds numbers on the flow and heat transfer in a metal organic chemical vapor deposition (MOCVD) reactor is investigated both experimentally and numerically. Experimental data for pure hydrogen, helium, and nitrogen with induction heating are obtained at the Chemical Vapor Deposition Facility for Reactor Characterization at NASA Langley Research Center (LaRC). The test facility measures the velocity field inside the reactor using a three dimensional laser velocimeter. Temperatures of the fused silica walls are recorded using an infrared camera. Each gas is tested over a range of flow rates. These experimental runs are repeated using a three-dimensional computational fluid dynamics code which models the flow and heat transport throughout the reactor. The model accounts for the mechanisms of conjugate heat conduction, convection, and radiation. The analytical results are compared with the experimental data and used to assess the heat and mass transfer in the system as a function of the Richardson number, Ri equals Gr/Re2.

Paper Details

Date Published: 7 July 1997
PDF: 11 pages
Proc. SPIE 3123, Materials Research in Low Gravity, (7 July 1997); doi: 10.1117/12.277719
Show Author Affiliations
Mark Kannapel, CFD Research Corp. (United States)
Samuel A. Lowry, CFD Research Corp. (United States)
Anantha Krishnan, CFD Research Corp. (United States)
Ivan O. Clark, NASA Langley Research Ctr. (United States)
Paul V. Hyer, Lockheed Engineering and Sciences Co. (United States)
Edward J. Johnson Jr., Lockheed Engineering and Sciences Co. (United States)

Published in SPIE Proceedings Vol. 3123:
Materials Research in Low Gravity
Narayanan Ramachandran, Editor(s)

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