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Proceedings Paper

Image sensing method and defect detection algorithm for a 256-Mbit and 1-Gbit DRAM mask inspection system
Author(s): Hiromu Inoue; Kentaro Okuda; Takehiko Nomura; Hideo Tsuchiya; Mitsuo Tabata
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Paper Abstract

This paper describes an image sensing method and defect detection algorithm applied for a newly developed mask inspection system, the MC-2000, for 256 Mbit and 1 Gbit DRAM masks. The MC-2000, which utilizes i-line wavelength optics, is designed for less than 0.2 micrometer defect detection capability. An image sensing system employing a TDI (time delay integration) CCD image sensor is used for i-line image acquisition with an 80 Mpixel/sec data rate. Defect detection is done by comparing sensor image data with CAD data. Here we utilized our original differential comparison method which has very high sensitivity for defect detection.

Paper Details

Date Published: 28 July 1997
PDF: 8 pages
Proc. SPIE 3096, Photomask and X-Ray Mask Technology IV, (28 July 1997); doi: 10.1117/12.277286
Show Author Affiliations
Hiromu Inoue, Toshiba Corp. (Japan)
Kentaro Okuda, Toshiba Corp. (Japan)
Takehiko Nomura, Toshiba Corp. (Japan)
Hideo Tsuchiya, Toshiba Corp. (Japan)
Mitsuo Tabata, Toshiba Corp. (Japan)

Published in SPIE Proceedings Vol. 3096:
Photomask and X-Ray Mask Technology IV
Naoaki Aizaki, Editor(s)

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