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Proceedings Paper

Microactuator fabricated by powder particle assemblage using microprobe technology
Author(s): Takeshi Konno; Mitsuru Egashira; Norio Shinya
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Paper Abstract

In the previous paper, preliminary research results on powder particle assemblage technique using a microprobe was reported. It was shown that the technique makes it possible to manipulate powder particles one by one, etch microscopically and weld the powder particle into a substrate or other powder particles. In this work, the welding mechanism of this method and metallurgical properties of welded parts were investigated, and micro- actuators were fabricated by means of powder particle assemblage technique using the microprobe. The results indicated the potentiality of this technique for application to assemblage of micro-machine and micro-devices.

Paper Details

Date Published: 19 June 1997
PDF: 6 pages
Proc. SPIE 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS, (19 June 1997); doi: 10.1117/12.276629
Show Author Affiliations
Takeshi Konno, National Research Institute for Metals (Japan)
Mitsuru Egashira, National Research Institute for Metals (Japan)
Norio Shinya, National Research Institute for Metals (Japan)


Published in SPIE Proceedings Vol. 3046:
Smart Structures and Materials 1997: Smart Electronics and MEMS
Vijay K. Varadan; Paul J. McWhorter, Editor(s)

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