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Proceedings Paper

Gray-scale deformable grating spatial light modulator for high-speed optical processing
Author(s): Miles L. Scott; Lawrence A. Bieber; Thottam S. Kalkur
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Paper Abstract

Gray scale deformable grating spatial light modulators have been fabricated using surface MEMS processes and are being tested prior to integration with addressing silicon backplanes. Modulation rates in excess of 100 kHz have been observed with test devices as have modulation depths nearing 40 dB.

Paper Details

Date Published: 19 June 1997
PDF: 8 pages
Proc. SPIE 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS, (19 June 1997); doi: 10.1117/12.276600
Show Author Affiliations
Miles L. Scott, Silicon Mountain Design (United States)
Lawrence A. Bieber, Silicon Mountain Design (United States)
Thottam S. Kalkur, Univ. of Colorado/Colorado Springs (United States)


Published in SPIE Proceedings Vol. 3046:
Smart Structures and Materials 1997: Smart Electronics and MEMS
Vijay K. Varadan; Paul J. McWhorter, Editor(s)

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