Share Email Print

Proceedings Paper

Improved signal processing method for heterodyne interferometer
Author(s): Hongzhi Zhao; Yang Zhao
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

On the basis of the combination of phase measurement and integer periodic phase measurement, a signal processing scheme, which is used for optical heterodyne interferometer with large range, is described. It not only maintains the high measuring resolution , but also enlarges the measuring range, with solving the problem of large range and measurement of dynamic displacement.

Paper Details

Date Published: 17 July 1996
PDF: 4 pages
Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); doi: 10.1117/12.276329
Show Author Affiliations
Hongzhi Zhao, Tsinghua Univ. (United States)
Yang Zhao, Tsinghua Univ. (United States)

Published in SPIE Proceedings Vol. 2860:
Laser Interferometry VIII: Techniques and Analysis
Malgorzata Kujawinska; Ryszard J. Pryputniewicz; Mitsuo Takeda, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?