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Proceedings Paper

Generalized algorithm for phase shifting interferometry
Author(s): Shouhong Tang
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Paper Abstract

A new generalized algorithm for phase extraction from interferograms recorded sequentially at different phase shifts is proposed. It is developed from the principle of least-square fining with a weight function. This algorithm removes many of the restrictions imposed by conventional phase-measuring algorithms, such as requiring a constant phase shift between consecutive interferograms. This algorithm can estimate phase from a series of sample interferograms with arbitrary phase shift, as long as the phase shifts between these interferograms are known. By introducing the proper weight function, the proposed algorithm is able to estimate the phase with a high degree of tolerance to common error sources including phase-shift mis-estimation and detector nonlinearity. Consequently, this technique may offer improved phase estimation relative to unweighted generalized algorithms using the same number of intensity frames. Theoretical analysis and results supported by numerical simulation and experiments are presented. Keywords: phase shifting interferometry, optical metrology, phase-measuring algorithms.

Paper Details

Date Published: 17 July 1996
PDF: 11 pages
Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); doi: 10.1117/12.276324
Show Author Affiliations
Shouhong Tang, Phase Shift Technology, Inc. (United States)

Published in SPIE Proceedings Vol. 2860:
Laser Interferometry VIII: Techniques and Analysis
Malgorzata Kujawinska; Ryszard J. Pryputniewicz; Mitsuo Takeda, Editor(s)

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