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Proceedings Paper

Nonoptical surface measurement by oblique incidence interferometry
Author(s): Yukitoshi Otani; Naoko Okuhara; Toru Yoshizawa
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Paper Abstract

Conventional interferometers are not always appropriate for measurement of rough or uneven non-optical surfaces. For the solution of this problem, an oblique incidence interferometry was proposed with a spatial phase-shifting technique of only one image. This technique can analyze surface profiles using only one image which contains high carrier frequency, and in this method such mechanical shifting device as requires high repeatability is not necessary. Therefore, more accurate and speedy measurement can be realized by using this principle. As an application of this technique, the Poison's ratio values of brittle materials are analyzed. The surface deformation after pure bending can be easily measured by this technique. Therefore Poison's ratio is calculated by relationship between Poison's ratio and the contour pauern of displacement from only two fringe images acquired before and after the bending.

Paper Details

Date Published: 17 July 1996
PDF: 4 pages
Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); doi: 10.1117/12.276318
Show Author Affiliations
Yukitoshi Otani, Tokyo Univ. of Agriculture and Technology (Japan)
Naoko Okuhara, Tokyo Univ. of Agriculture and Technology (Japan)
Toru Yoshizawa, Tokyo Univ. of Agriculture and Technology (Japan)

Published in SPIE Proceedings Vol. 2860:
Laser Interferometry VIII: Techniques and Analysis
Malgorzata Kujawinska; Ryszard J. Pryputniewicz; Mitsuo Takeda, Editor(s)

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