Optical metrology instrumentation produce coded data (fringe patterns for example) that represent a transformation of the interesting variable being measured. Although the coding process is well known and unique, the inverse coding process may have an infinite number of solutions. The inverse coding process is the one that allow us to estimate the quantity being measured from the coded image produce by the optical measuring instrument. Fortunately, one usually have a priori information about the behavior or properties of the searched solution. Regularizing [l} an inverse source problem is a process of integrating prior information about the physical variable under analysis in order to obtain a unique and plausible solution. In this paper we show two cases that uses as prior information linear operators over the physical variable being measured in order to regularize the problem. This regularizing approach is applied to shearing interferometry and to the Hartman test. Keywords: shearograms, hartmangrams, fringes, interferometry, regularization, phase detection, quadratic functionals, estimation.

Date Published: 17 July 1996
PDF: 10 pages
Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); doi: 10.1117/12.276314

Published in SPIE Proceedings Vol. 2860:
Laser Interferometry VIII: Techniques and Analysis
Malgorzata Kujawinska; Ryszard J. Pryputniewicz; Mitsuo Takeda, Editor(s)