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Proceedings Paper

Stepper matching for optimum line performance
Author(s): Tom Dooly; Ying-Ying Yang
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Paper Abstract

A method of stepper set-up, maintenance, and tracking is described that is intended to match the overlay performance of multiple-model steppers in a multiple technology manufacturing line. The philosophy of this method is to determine, track and control systematic errors associated with overlay, and to measure and characterize the non- systematic or random errors to determine the base line performance capability of the stepper tool set. A description of the stepper set-up procedure, the data collection and analysis routines, and data from these procedures will be presented. A matrix of baseline stepper- to-stepper performance will be shown, along with additional analysis of non-systematic errors that were found to be not very `random'. An example of line performance after stepper set-up will be shown, along with a discussion on differences between set-up analysis and production lot measurements.

Paper Details

Date Published: 7 July 1997
PDF: 7 pages
Proc. SPIE 3051, Optical Microlithography X, (7 July 1997); doi: 10.1117/12.276028
Show Author Affiliations
Tom Dooly, SGS-Thomson Microelectronics, Inc. (United States)
Ying-Ying Yang, SGS-Thomson Microelectronics, Inc. (United States)

Published in SPIE Proceedings Vol. 3051:
Optical Microlithography X
Gene E. Fuller, Editor(s)

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