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Proceedings Paper

Dependence of optical constants of AZ BARLi bottom coating on bake conditions
Author(s): Ralph R. Dammel; John P. Sagan; Ron A. Synowicki
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Paper Abstract

The optical constants of AZRBARLiTM bottom coat have been determined by spectroscopic ellipsometry as a function of bake conditions. Cauchy parameters are reported as a function of bake conditions for three film thicknesses, corresponding to the first three minima of the reflectivity versus AZRBARLiTM film thickness curve. Full dispersion curves were obtained for constant spin speed and constant thickness conditions. It is found that the k dispersion curves show a slope change at 160 - 170 degrees Celsius bake temperature which is tentatively attributed to dye depletion and the formation of a graded layer in the bottom coat.

Paper Details

Date Published: 7 July 1997
PDF: 11 pages
Proc. SPIE 3049, Advances in Resist Technology and Processing XIV, (7 July 1997); doi: 10.1117/12.275896
Show Author Affiliations
Ralph R. Dammel, Hoechst Celanese Corp. (United States)
John P. Sagan, Hoechst Celanese Corp. (United States)
Ron A. Synowicki, J.A. Woollam Co., Inc. (United States)

Published in SPIE Proceedings Vol. 3049:
Advances in Resist Technology and Processing XIV
Regine G. Tarascon-Auriol, Editor(s)

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