We recently synthesized and studied a number of highly absorptive diketo azo dyes. These materials, existed in the hydrazo tautomeric forms, showed high extinction coefficients, typically (epsilon) approximately equals 25,000 - 39,000 at 365 nm. They also exhibited good solubility in common resist casting solvents such as propylene glycol monoethyl acetate (PGMEA) and ethyl lactate. The thermostability of the materials was investigated. The impact of these diketo azo dyes on i-line resist performance in terms of swing reduction, reflective notching control and lithographic performance is discussed.

Date Published: 7 July 1997
PDF: 14 pages
Proc. SPIE 3049, Advances in Resist Technology and Processing XIV, (7 July 1997); doi: 10.1117/12.275880

Published in SPIE Proceedings Vol. 3049:
Advances in Resist Technology and Processing XIV
Regine G. Tarascon-Auriol, Editor(s)