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Proceedings Paper

Power measurements of exposure radiation using thin metal film sensors
Author(s): Harish M. Manohara; Kevin J. Morris; J. Michael Klopf; Gina M. Calderon; Jason Babin; Olga Vladimirsky; Yuli Vladimirsky
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Paper Abstract

An exposure radiation power measurement technique utilizing thin gold film thermal sensors has been presented. The sensory system of the power meter (or calorimeter) consists of three interlaced serpentine resistors covering an area of 6 cm by 0.4 cm, functioning as a thermal sensor, a heater and a shielding electrode. The measurement principle is based on recording the change in resistance of the sensor due to heating under radiation and internal calibration. The interlaced gold sensors were fabricated using optical lithography on a 100 mm diameter silicon wafer. The power measurements have been performed at CAMD/LSU 1.3 - 1.5 GeV synchrotron source, on a 'white light' beamline (Emax approximately 4 keV). The measurement results agree with calculations within approximately 4%. The relaxation time of the calorimeter response was 90 seconds in vacuum (10-4Torr) and 18 seconds in 25 Torr helium. The power from a UV lamp of an ORIEL optical exposure station was measured using an interlaced thermal sensor and a commercial calorimeter. The results agree within 2%.

Paper Details

Date Published: 7 July 1997
PDF: 5 pages
Proc. SPIE 3048, Emerging Lithographic Technologies, (7 July 1997); doi: 10.1117/12.275791
Show Author Affiliations
Harish M. Manohara, Louisiana State Univ. (United States)
Kevin J. Morris, Louisiana State Univ. (United States)
J. Michael Klopf, Louisiana State Univ. (United States)
Gina M. Calderon, Louisiana State Univ. (United States)
Jason Babin, Louisiana State Univ. (United States)
Olga Vladimirsky, Univ. of Wisconsin/Madison (United States)
Yuli Vladimirsky, Univ. of Wisconsin/Madison (United States)


Published in SPIE Proceedings Vol. 3048:
Emerging Lithographic Technologies
David E. Seeger, Editor(s)

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