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Proceedings Paper

cw laser compaction of aqueous-solution-deposited metal oxide films
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Paper Abstract

Zirconium dioxide films were spin cast onto silica or silicon substrates from an aqueous solution comprised of the precursor metal nitrate and an organic complexant such as glycine. The hydrated films so derived consist of an amorphous organic phase in which the metal cations and nitrate anions are homogeneously dispersed. Heating to temperatures above 200 degrees C leads to film dehydration followed by an auto-catalyzed oxidation reaction whereby the bound nitrate oxidizes the organic matrix leaving behind an intact stoichiometric and crystalline metal oxide film. Films are characterized using AFM, XRD, and optical methods. Transformation processes in these films have been studied in detail by means of spectroscopic ellipsometry and laser induced fluorescence from films doped with a suitable rare earth probe ion such as Sm+3. In the latter case, the measured fluorescence emission spectra are used to identify the hydrated, dehydrated, amorphous and crystalline metal oxide phases which evolve during processing. These transformations also have been induced upon visible CW laser irradiation at fluences in excess of 1 MW/cm2. Under these conditions, the film dehydrates and compacts within the footprint of the incident laser beam rendering this region of the film water insoluble. Post irradiation washing of the film with water removes all vestiges of the film outside of the beam footprint suggesting a possible use of this technique for lithography applications. Films subjected to laser irradiation and post irradiation heating have been characterized with respect to thickness, phase composition, crystallite size and optical constants.

Paper Details

Date Published: 13 May 1997
PDF: 8 pages
Proc. SPIE 2966, Laser-Induced Damage in Optical Materials: 1996, (13 May 1997); doi: 10.1117/12.274284
Show Author Affiliations
Gregory J. Exarhos, Pacific Northwest National Lab. (United States)
Tasshi Dennis, Rice Univ. (United States)

Published in SPIE Proceedings Vol. 2966:
Laser-Induced Damage in Optical Materials: 1996
Harold E. Bennett; Arthur H. Guenther; Mark R. Kozlowski; Brian Emerson Newnam; M. J. Soileau, Editor(s)

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