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Proceedings Paper

Laser machining of single-mode rib waveguides on germanosilicate slabs
Author(s): Peter R. Herman; Jianhao Yang; Kou Kurosawa; Takayuki Yamanishi
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Paper Abstract

Laser ablation was applied for the first time to define a rib waveguide on silica-based planar waveguides. The strong linear absorption of 157-nm radiation was key for producing smooth walls without surface microcracks or significant debris. The laser-formed rib guides were single-mode at 0.635-micrometer wavelength and had optical losses of approximately 4 dB/cm as a result of an approximately 40 nm (rms) surface roughness. Simple refinements to the laser etching procedure and extensions to 1.55-micrometer telecommunication wavelengths promise commercially attractive losses (less than or equal to 1 dB/cm) for application in processing optical integrated circuits.

Paper Details

Date Published: 9 May 1997
PDF: 5 pages
Proc. SPIE 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II, (9 May 1997); doi: 10.1117/12.273724
Show Author Affiliations
Peter R. Herman, Univ. of Toronto (Canada)
Jianhao Yang, Univ. of Toronto (Canada)
Kou Kurosawa, Univ. of Miyazaki (Japan)
Takayuki Yamanishi, Univ. of Miyazaki (Japan)

Published in SPIE Proceedings Vol. 2991:
Laser Applications in Microelectronic and Optoelectronic Manufacturing II
Jan J. Dubowski, Editor(s)

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