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Proceedings Paper

Ablation of ceramics by UV, visible, and IR pulsed laser radiation
Author(s): Vitali I. Konov; Friedrich Dausinger; Serge V. Garnov; Sergei M. Klimentov; Taras V. Kononenko; O. G. Tsarkova
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Paper Abstract

Multiparametric study of A1N ceramic ablation by high intensity (I less than or equal to 1013 W/cm2) nano and picosecond pulses of Nd:YAP laser have been performed. Ablation rates, surface morphology and element content, reflectivity and absorptivity of ceramic plates prior and after pulsed irradiation as well as high temperature material reflectivity have been measured. It is shown that high etch rate and good quality A1N ceramic microstructuring (cutting, hole drilling, pocket formation) can be obtained for the first, second and fourth laser harmonics if irradiation conditions are properly chosen. It was found that possibility to effectively process material, which initially weakly absorbs laser beam (first and second harmonic), it is determined by radiation and plasma induced surface modification. Comparison with other types of ceramics, such as Al2O3, Si3N4, SiC, is also made.

Paper Details

Date Published: 9 May 1997
PDF: 10 pages
Proc. SPIE 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II, (9 May 1997); doi: 10.1117/12.273722
Show Author Affiliations
Vitali I. Konov, General Physics Institute (Russia)
Friedrich Dausinger, Univ. Stuttgart (Germany)
Serge V. Garnov, General Physics Institute (Russia)
Sergei M. Klimentov, General Physics Institute (Russia)
Taras V. Kononenko, General Physics Institute (Russia)
O. G. Tsarkova, General Physics Institute (Russia)

Published in SPIE Proceedings Vol. 2991:
Laser Applications in Microelectronic and Optoelectronic Manufacturing II
Jan J. Dubowski, Editor(s)

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