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Proceedings Paper

Direct-write UV-laser microfabrication of 3D structures in lithium-aluminosilicate glass
Author(s): William W. Hansen; Siegfried W. Janson; Henry Helvajian
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Paper Abstract

The direct-write laser machining technique has been used to process a lithium-alumosilicate glass (FoturanTM) for an application which requires 3D patterned microstructures. Using two UV laser wavelengths (248 nm and 355 nm), microcavities and microstructures have been fabricated for the development of microthrusters for attitude and orbit control of a 1 kg class (10 cm diameter) nanosatellite. In addition, experiments have been conducted to define the processing window for the laser patterning technique. The results include a measure of the change in Foturan strength after a required program bake cycle plus HF etching rates as a function of the laser repetition rate for the two UV wavelengths.

Paper Details

Date Published: 9 May 1997
PDF: 9 pages
Proc. SPIE 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II, (9 May 1997); doi: 10.1117/12.273716
Show Author Affiliations
William W. Hansen, The Aerospace Corp. (United States)
Siegfried W. Janson, The Aerospace Corp. (United States)
Henry Helvajian, The Aerospace Corp. (United States)

Published in SPIE Proceedings Vol. 2991:
Laser Applications in Microelectronic and Optoelectronic Manufacturing II
Jan J. Dubowski, Editor(s)

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