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Proceedings Paper

Ellipsometry for correctly determining the void fraction and true refractive index of thin films
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Paper Abstract

Using two measurements in vacuum and under condition for condensing water, one might more correctly determine the true refractive index Ntrue and porosity Q with Bruggeman's EMA. The characteristics of chamber-attachment to ellipsometer, algorithm and application samples of new method for SiO2, ZrO2, HfO2, a-C:H, and In2O3-SnO2 films are presented. It is found that the differences between measurements of an effective refractive index Nef in air, in vacuum and with condensed water may be up to 0.09. The void fraction for these films are range from 0 to 0.277, Difference between Ntrue and N in air may be up to 0.036.

Paper Details

Date Published: 1 April 1997
PDF: 7 pages
Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); doi: 10.1117/12.271828
Show Author Affiliations
Vladimir A. Tolmachev, S.I. Vavilov State Optical Institute (Russia)

Published in SPIE Proceedings Vol. 3094:
Polarimetry and Ellipsometry
Maksymilian Pluta; Tomasz R. Wolinski, Editor(s)

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