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Proceedings Paper

Possibilities of ellipsometry with surface plasmon excitation in the investigation of thin films in comparison to separated ellipsometry and surface plasmon spectroscopy
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Paper Abstract

This article is devoted to the comparison of possibilities of ellipsometry, surface plasmon spectroscopy and their combination in the investigation of thin films. The problem of separation of the thickness and refractive index of the film of interest is considered as well as the possibility to find the transverse optical anisotropy of such film. The special attention to the way for comparison of different methods is paid. It is proved the only such way can show which method gives more information about an investigated systems and allows to inspect the surface treatment more exactly. Such comparison is made for different kinds of substrate in the case of standard ellipsometry, as well as for separated surface plasmon spectroscopy and ellipsometry with surface electromagnetic waves excitation.

Paper Details

Date Published: 1 April 1997
PDF: 11 pages
Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); doi: 10.1117/12.271821
Show Author Affiliations
Eugene G. Bortchagovsky, Institute of Semiconductor Physics (Ukraine)

Published in SPIE Proceedings Vol. 3094:
Polarimetry and Ellipsometry
Maksymilian Pluta; Tomasz R. Wolinski, Editor(s)

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