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Proceedings Paper

Micromachining with DUV lasers
Author(s): Hans Kurt Toenshoff; Heiner Kappel; Peter B. Heekenjann
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Paper Abstract

In many industrial branches a continuous scaling down of parts and products is observed. For example in the fields of micro-mechanics new sensors and actuators can be produced which offer the possibility of making self acting micro- systems. Other micro-components for medicine, chemistry or optics allow minimal invasive surgery and inspection. In every case conventional fabrication technologies such as turning and milling have to be carefully investigated: their appropriateness for the production of micro-parts is not always guaranteed. On the other hand new technologies such as the LIGA-process (German acronym for lithography, galvano forming and plastic molding process) open new ways to inexpensive mass-production. The following paper describes the potential of DUV-lasers (laser wavelength: lambda equals 200 - 280 nm) for micro-machining specific applications. Using excimer-lasers the machining of ceramics, glass and polymer materials is presented. The excellent beam properties of a self developed quadrupled Nd:YAG-laser are used for the repair of photolithographic masks. The mask repair using ablation and deposition of chromium on glass substrate is described.

Paper Details

Date Published: 2 April 1997
PDF: 11 pages
Proc. SPIE 3091, Laser Applications Engineering (LAE-96), (2 April 1997); doi: 10.1117/12.271775
Show Author Affiliations
Hans Kurt Toenshoff, Laser Zentrum Hannover eV (Germany)
Heiner Kappel, Laser Zentrum Hannover eV (Germany)
Peter B. Heekenjann, Laser Zentrum Hannover eV (Germany)

Published in SPIE Proceedings Vol. 3091:
Laser Applications Engineering (LAE-96)
Vadim P. Veiko, Editor(s)

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