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Proceedings Paper

InP-based micromechanical tunable and selective photodetector for WDM systems
Author(s): Christian Seassal; Jean Louis Leclercq; Xavier Letartre; A. Gagnaire; Michel Gendry; Pierre Viktorovitch; J. P. Laine; F. Sidoroff; Ronan Le Dantec; C. Miu; Taha Benyattou; Gerard Guillot; D. Rondi; Robert R. Blondeau
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Paper Abstract

The design and the fabrication of vertical InP-based micro- opto-electro-mechanical devices are reported. These are based on micromachined III-V semiconductor structures realized by selective removal of adapted sacrificial layers in order to produce Fabry-Perot resonant microcavity. Continuous wavelength running of 50nm around 1.55 micrometers for a 15 volt bias actuation has been demonstrated. Resonant peak full width at half maximum of about 10 nm at 1.5 micrometers has been performed on a InP/air gap multilayered interferometric filter. The integration of absorbing layers inside the cavity will allow us to realize resonant cavity enhanced photonic devices with thinner, and therefore faster, photodetector structures with high quantum efficiencies.

Paper Details

Date Published: 11 April 1997
PDF: 6 pages
Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); doi: 10.1117/12.271441
Show Author Affiliations
Christian Seassal, Ecole Centrale de Lyon (France)
Jean Louis Leclercq, Ecole Centrale de Lyon (France)
Xavier Letartre, Ecole Centrale de Lyon (France)
A. Gagnaire, Ecole Centrale de Lyon (France)
Michel Gendry, Ecole Centrale de Lyon (France)
Pierre Viktorovitch, Ecole Centrale de Lyon (France)
J. P. Laine, Ecole Centrale de Lyon (France)
F. Sidoroff, Ecole Centrale de Lyon (France)
Ronan Le Dantec, Institut National des Sciences Appliquees de Lyon (France)
C. Miu, Institut National des Sciences Appliquees de Lyon (France)
Taha Benyattou, Institut National des Sciences Appliquees de Lyon (France)
Gerard Guillot, Institut National des Sciences Appliquees de Lyon (France)
D. Rondi, Thomson-CSF (France)
Robert R. Blondeau, Thomson-CSF (France)

Published in SPIE Proceedings Vol. 3008:
Miniaturized Systems with Micro-Optics and Micromechanics II
M. Edward Motamedi; Larry J. Hornbeck; Kristofer S. J. Pister, Editor(s)

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