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Proceedings Paper

LIGA tunable spectral filter performance
Author(s): J. Allen Cox; David C. Dobson; Thomas R. Ohnstein; J. David Zook
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Paper Abstract

Using LIGA techniques, a transmissive diffraction grating device in permalloy with variable, and controllable, grating period has been designed and fabricated for use as a tunable infrared spectral filer. Typical device parameters exhibit parameters exhibit periods approximately 8-30 microns, permalloy grating lines approximately 3 microns wide by 10- 50 microns high. In Ell polarization, the device acts as low pass spectral filter with cutoff wavelength determined by the variable grating period. Recent developments in fabrication of the gratin structure and actuator are reviewed briefly. Emphasis is given to results of recent performance modeling both for thinner and shorter grating walls suitable for shorter wavelength applications and to demonstrate the effects of an incident spherical wave.

Paper Details

Date Published: 11 April 1997
PDF: 7 pages
Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); doi: 10.1117/12.271426
Show Author Affiliations
J. Allen Cox, Honeywell Technology Ctr. (United States)
David C. Dobson, Texas A&M Univ. (United States)
Thomas R. Ohnstein, Honeywell Technology Ctr. (United States)
J. David Zook, Honeywell Technology Ctr. (United States)

Published in SPIE Proceedings Vol. 3008:
Miniaturized Systems with Micro-Optics and Micromechanics II
M. Edward Motamedi; Larry J. Hornbeck; Kristofer S. J. Pister, Editor(s)

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