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Proceedings Paper

Ultraviolet Mirau correlation microscopy
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Paper Abstract

We report our work towards improving the resolution performance of a conventional Mirau correlation microscope (MCM) by operating in the UV. We have modified the Mirau interferometer with the introduction of new thin-film beamsplitters that are nonattenuative in the ultra-violet, and new interferometer structure that can be made to work with short working distance objectives. Along with special UV optics, the new MCM can be made to operate in the ultra- violet region. By operating at 248 nm mercury line, the expected resolution improvement in both transverse and depth directions should be nearly doubled. A fully working MCM UV system at 325 nm is described in detail, and demonstrates the feasibility for a 248 nm system once a high quality 248 nm objective becomes available.

Paper Details

Date Published: 10 April 1997
PDF: 12 pages
Proc. SPIE 2984, Three-Dimensional Microscopy: Image Acquisition and Processing IV, (10 April 1997); doi: 10.1117/12.271277
Show Author Affiliations
Fang Cheng Chang, Stanford Univ. (United States)
Gordon S. Kino, Stanford Univ. (United States)

Published in SPIE Proceedings Vol. 2984:
Three-Dimensional Microscopy: Image Acquisition and Processing IV
Carol J. Cogswell; Jose-Angel Conchello; Tony Wilson, Editor(s)

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