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Proceedings Paper

Micromachined aperture probe tip for multifunctional scanning probe microscopy
Author(s): Michael Abraham; Wolfgang Ehrfeld; Manfred Lacher; Karsten Mayr; Wilfried Noell; Peter Guethner; Joachim Barenz
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Paper Abstract

The paper presents a new concept of a micromachined integrated sensor for combined atomic force/near field optical microscopy. The sensor consists of a microfabricated cantilever with an integrated waveguide and a transparent near field aperture tip. The advantage compare to the fiber based near field tips is the high reproducibility of the aperture and the control of the tip-sample distance by the AFM-channel. The key process consists in a novel micromachined aperture tip. The aperture tip is fabricated in a reliable batch process which has the potential for implementation in micromachining processes of scanning probe microscopy sensors and therefore leads to new types of multifunctional probes. For evaluation purposes, the tip was attached to an optical fiber by a microassembly setup and subsequently installed in a near-field scanning optical microscopy. First measurements of topographical and optical near-field patterns demonstrate the proper performance of the hybrid probe.

Paper Details

Date Published: 15 April 1997
PDF: 9 pages
Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); doi: 10.1117/12.271226
Show Author Affiliations
Michael Abraham, Institute of Microtechnology Mainz (Germany)
Wolfgang Ehrfeld, Institute of Microtechnology Mainz (Germany)
Manfred Lacher, Institute of Microtechnology Mainz (Germany)
Karsten Mayr, Institute of Microtechnology Mainz (Germany)
Wilfried Noell, Institute of Microtechnology Mainz (Germany)
Peter Guethner, Omicron Vakuumphysik GmbH (Germany)
Joachim Barenz, Univ. of Ulm (Germany)

Published in SPIE Proceedings Vol. 3009:
Micromachining and Imaging
Terry A. Michalske; Mark A. Wendman, Editor(s)

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