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Proceedings Paper

Tapping mode scanning capacitance microscopy: feasibility of quantitative capacitance measurement
Author(s): Kazuya Goto; Kazuhiro Hane
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Paper Abstract

Tapping mode scanning capacitance microscopy is a new technique to study local capacitances. It is a combination of the tapping mode scanning force microscopy and the scanning capacitance microscopy. With the tapping motion of the tip, tip-sample distance is accurately regulated. In addition, topographic images are simultaneously obtained together with the capacitive images. In this paper, feasibility of the quantitative capacitance determination is described. Experimental results with a silicon nitride film are compared with the theoretical curve. The effective electrode area (lateral resolution) and the tip-sample capacitance were calculated.

Paper Details

Date Published: 15 April 1997
PDF: 8 pages
Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); doi: 10.1117/12.271216
Show Author Affiliations
Kazuya Goto, Tohoku Univ. (Japan)
Kazuhiro Hane, Tohoku Univ. (Japan)

Published in SPIE Proceedings Vol. 3009:
Micromachining and Imaging
Terry A. Michalske; Mark A. Wendman, Editor(s)

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