Light coupling systems, such as gratings are required because quantum well infrared photodetectors do not respond to normal incident light due to the quantum mechanical selection rules associated with intersubband transitions. The resolution of the photolithography and accuracy of the etching become key issues in producing smaller grating features sizes especially in shorter wavelengths. An enhancement factor of three due to 2D periodic grating fabricated on a QWIP structure was observed. Variation of the enhancement factor with groove depth and feature size of the grating can be theoretically explained.

Date Published: 15 April 1997
PDF: 6 pages
Proc. SPIE 2999, Photodetectors: Materials and Devices II, (15 April 1997); doi: 10.1117/12.271180

Published in SPIE Proceedings Vol. 2999:
Photodetectors: Materials and Devices II
Gail J. Brown; Manijeh Razeghi, Editor(s)