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Coaxial, cylindrical, and planar UV excilamps pumped by glow or barrier discharge
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Paper Abstract

Design and operating parameters of powerful KrCl((lambda) approximately 222nm), XeCl((lambda) approximately 308nm) excilamps with different discharge geometry pumped by continuous glow discharges along with Ar2((lambda) approximately 126nm) and Kr2((lambda) approximately 146nm) excilamps pumped by barrier discharge are presented. Excilamps with high spatial uniformity of the output and gas lifetime up to 100 hours were developed. It was shown that efficiency of luminescence of exciplex molecules of about 30 percent can be obtained in high-voltage glow discharge and positive column of glow discharge. Output at (lambda) approximately 222nm up to 200 W from single excilamp and 500 W from three excilamps, operated in parallel, was demonstrated.

Paper Details

Date Published: 31 March 1997
PDF: 11 pages
Proc. SPIE 2992, Excimer Lasers, Optics, and Applications, (31 March 1997);
Show Author Affiliations
Victor F. Tarasenko, Institute of High Current Electronics (Russia)
Mikhail I. Lomaev, Institute of High Current Electronics (Russia)
Alexei N. Panchenko, Institute of High Current Electronics (Russia)
Edward A. Sosnin, Institute of High Current Electronics (Russia)

Published in SPIE Proceedings Vol. 2992:
Excimer Lasers, Optics, and Applications
Harry Shields; Peter E. Dyer, Editor(s)

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