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Proceedings Paper

Small excimers opening up new industrial applications
Author(s): Glenn Ogura; Rod Andrew
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Paper Abstract

The development of small excimer lasers with relatively small pulse energies but with the capability of reaching high repetition rates, coupled to acceptable gas lifetimes and good beam quality, has opened up new opportunities for laser applications in manufacturing. In some niche applications, such as ophthalmology and micromachining, these lasers provide comparable energy density to their much larger counterparts and with proper overall laser system design, sufficient target areas can be covered. Such small lasers allow production engineers to seriously consider using such laser systems due to the reduced capital investment and small footprint. This paper explores some of the new applications and benefits of this technology.

Paper Details

Date Published: 31 March 1997
PDF: 8 pages
Proc. SPIE 2992, Excimer Lasers, Optics, and Applications, (31 March 1997); doi: 10.1117/12.270091
Show Author Affiliations
Glenn Ogura, Resonetics, Inc. (Belgium)
Rod Andrew, OPTEC SA (Belgium)

Published in SPIE Proceedings Vol. 2992:
Excimer Lasers, Optics, and Applications
Harry Shields; Peter E. Dyer, Editor(s)

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