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Proceedings Paper

Excimer lasers in manufacturing
Author(s): Heinrich Endert; Rainer Paetzel; Uwe Stamm; Dirk Basting
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Paper Abstract

The year 1997 will become known as the 'year of commercial excimer lasers.' The number of installations on manufacturing and medical floors will be much higher than ever before. Besides the medical uses the most important applications are DUV lithography, TFT annealing for flat panel displays and microdrilling for nozzle arrays, especially for ink jet printer heads. Recently two very important breakthroughs were achieved. The first is in regard to the performance of the excimer laser itself. The second is a much more efficient way of using the UV photons. These are the main reasons for the actual success. Technology development by laser manufacturers has resulted in remarkable improvements of component lifetime, reliability, cost of ownership and ease of use. With gas and optics lifetimes in excess of 108 pulses, laser tube exchange intervals longer than 5 multiplied by 109 pulses and integration of internal halogen generators a quasi sealed-off excimer laser with hands-free operation is accomplished. The new generation NovaLineTM combines the experience of more than 4000 installed excimer lasers with a completely new laser engineering design. Progress in advanced UV optics will be demonstrated with two examples. In commercial production of very precise nozzle arrays, high-end optics allow the drilling of all nozzles simultaneously with an optical distortion of less than 0.5 micrometer over a full 0 18 mm processing field. For scanning applications as AMLCD annealing, the rectangular laser beam can be optically transformed into a very homogeneous line, up to 300 mm long and 0.5 mm wide.

Paper Details

Date Published: 27 March 1997
PDF: 8 pages
Proc. SPIE 2993, Lasers as Tools for Manufacturing II, (27 March 1997); doi: 10.1117/12.270013
Show Author Affiliations
Heinrich Endert, Lambda Physik GmbH (Germany)
Rainer Paetzel, Lambda Physik GmbH (Germany)
Uwe Stamm, Lambda Physik GmbH (Germany)
Dirk Basting, Lambda Physik (Germany)

Published in SPIE Proceedings Vol. 2993:
Lasers as Tools for Manufacturing II
Leonard R. Migliore; Ronald D. Schaeffer, Editor(s)

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