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Proceedings Paper

Formation and properties of chemically sprayed ZnO films
Author(s): Malle Krunks; Enn Mellikov; Olga Bijakina; Tiit Varema; Dieter Meissner
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Paper Abstract

ZnO thin films with electrical resistance as low as 10-3 (Omega) (DOT)cm and transparency of 90 - 95% have been prepared by spray pyrolysis of zinc acetate solutions. However, a careful optimization of all deposition conditions is needed in order to obtain films with these values. Thermal decomposition of precursor, the influence of preparation conditions on the film properties and on the film formation mechanism are studied. The stepwise thermal destruction of Zn(CH3CO2)2(DOT)2H2O is recorded and it is shown, that single solid phase ZnO is the only decomposition product at temperatures higher than 590 K in air. Three characteristic temperature regions were distinguished in the film growth process exhibiting each a different mechanism of crystal growth and leading to different thin film qualities. The optical, structural, morphological and electrical properties of sprayed films are mainly determined by growth temperature and are in dependence on the concentration of dopants. This can be explained on the basis of changes in the growth mechanisms and chemical purity of the films.

Paper Details

Date Published: 6 February 1997
PDF: 6 pages
Proc. SPIE 2968, Optical Organic and Semiconductor Inorganic Materials, (6 February 1997); doi: 10.1117/12.266821
Show Author Affiliations
Malle Krunks, Tallinn Technical Univ. (Estonia)
Enn Mellikov, Tallinn Technical Univ. (Estonia)
Olga Bijakina, Tallinn Technical Univ. (Estonia)
Tiit Varema, Tallinn Technical Univ. (Estonia)
Dieter Meissner, Institute of Energy Process Engineering (Austria)

Published in SPIE Proceedings Vol. 2968:
Optical Organic and Semiconductor Inorganic Materials
Edgar A. Silinsh; Arthur Medvids; Andrejs R. Lusis; Andris O. Ozols, Editor(s)

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