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Proceedings Paper

Photolithography challenges for the micromachining industry
Author(s): David Craven
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Paper Abstract

Micromachining can be considered a fabrication technology for building devices with feature sizes from a few microns to a few mils, often with moving parts. MicroeElectroMechemical Systems (MEMS) is a term often used interchangeably with micromachining. MEMS devices, however, are distinguished from micromachining by their mechanical nature, because moving parts are often a required component to enable them to sense or manipulate the external environment.

Paper Details

Date Published: 27 December 1996
PDF: 10 pages
Proc. SPIE 2884, 16th Annual BACUS Symposium on Photomask Technology and Management, (27 December 1996); doi: 10.1117/12.262838
Show Author Affiliations
David Craven, Ultratech Stepper (United States)

Published in SPIE Proceedings Vol. 2884:
16th Annual BACUS Symposium on Photomask Technology and Management
Gilbert V. Shelden; James A. Reynolds, Editor(s)

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