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Proceedings Paper

Laser direct writing system for fabrication of smooth-relief micro-optical elements
Author(s): V. B. Svetovoy; Ildar I. Amirov; Yu. E. Babanov
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Paper Abstract

A direct writing system based on a pulsed N2 laser is presented. It allows to create continuous relief in a number of polymeric materials. Polymers are etched in air directly under the laser beam action. It is possible to make a computer controlling smooth relief with a depth more than 40 micrometers . High speed cylindrical lens has been fabricated in polyamide film to demonstrate the abilities of the system.

Paper Details

Date Published: 27 December 1996
PDF: 4 pages
Proc. SPIE 2969, Second International Conference on Optical Information Processing, (27 December 1996); doi: 10.1117/12.262648
Show Author Affiliations
V. B. Svetovoy, Institute of Microelectronics (Russia)
Ildar I. Amirov, Institute of Microelectronics (Russia)
Yu. E. Babanov, Institute of Microelectronics (Russia)

Published in SPIE Proceedings Vol. 2969:
Second International Conference on Optical Information Processing
Zhores I. Alferov; Yuri V. Gulyaev; Dennis R. Pape, Editor(s)

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