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Proceedings Paper

Tabletop factory to fabricate 3D microstructures: nano manufacturing world
Author(s): Masayuki Nakao; Yotaro Hatamura; Tomomasa Sato
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Paper Abstract

To fabricate 3D microstructures, the authors designed, constructed and evaluated a tabletop factory called 'nano manufacturing world (NMW).' We designed a compact, concentrated layout of fabricating/handling machines around a workpiece for an integrated production, and an image- assisted tele-operation system between the processing site and the operating site. Using various working processes developed in NMW, e.g. dry-etching with a fast atom beam or assembling with a concentrated motion manipulator under a scanning electron microscope, we demonstrated fabricating some 3D microstructures such as a micro-tower or a micro- airplane. In addition to fabricate functional film features on the 3D microstructures, we are producing a micro magnetic head or a micro optical circuit in NMW. Through the demonstration, we evaluate that NMW functions effectively as designed and will become a solution for micro manufacturing systems.

Paper Details

Date Published: 11 December 1996
PDF: 8 pages
Proc. SPIE 2906, Microrobotics: Components and Applications, (11 December 1996); doi: 10.1117/12.260629
Show Author Affiliations
Masayuki Nakao, Univ. of Tokyo (Japan)
Yotaro Hatamura, Univ. of Tokyo (Japan)
Tomomasa Sato, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 2906:
Microrobotics: Components and Applications
Armin Sulzmann, Editor(s)

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