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Proceedings Paper

Stick and slip actuators and parallel architectures dedicated to microrobotics
Author(s): Jean-Marc Breguet; Eric Pernette; Reymond Clavel
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Paper Abstract

Stick and slip actuators are particularly well adapted to microrobotics. A simple design, a very high intrinsic resolution (a few nanometers) and a high rigidity makes them specially interesting for high precision micro manipulations. Moreover, a smart design allows the user to combine the guiding and actuating functions. Parallel architectures are attractive to microrobotics too. They present a high rigidity and the actuators are fixed on the base. This paper deals with the integration of stick and slip actuators in a 6-degrees-of-freedom parallel structure dedicated to the micro assembly of optical components. In section 3 we describe and characterize inertial actuators using the stick and slip effect. We demonstrate their performances (velocity higher than 1.5 mm/s, 10 nm precision) and limits. In section 4 we describe the 6- degrees-of-freedom parallel architecture that we developed for our application and how the actuators are integrated into it. Its kinematics, the joins' forces and the working volume have been calculated. A resolution better than 30 nm is possible within a working volume of 140 mm3. Orientations of several degrees (up to plus or minus five degrees) are possible for the three rotational angles.

Paper Details

Date Published: 11 December 1996
PDF: 12 pages
Proc. SPIE 2906, Microrobotics: Components and Applications, (11 December 1996); doi: 10.1117/12.260626
Show Author Affiliations
Jean-Marc Breguet, Swiss Federal Institute of Technology Lausanne (Switzerland)
Eric Pernette, Swiss Federal Institute of Technology Lausanne (Switzerland)
Reymond Clavel, Swiss Federal Institute of Technology Lausanne (Switzerland)

Published in SPIE Proceedings Vol. 2906:
Microrobotics: Components and Applications
Armin Sulzmann, Editor(s)

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