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Proceedings Paper

Trial of telemicromachining under SEM using ISDN
Author(s): Mamoru Mitsuishi; Naohiko Sugita; Toshio Hori; Takaaki Nagao; Yotaro Hatamura
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Paper Abstract

This paper describes a tele-micro machining system which works under a stereo SEM and has operational environment transmission capability. The system includes a 3-axis force sensing table, the signal from which is converted into auditory information to enhance the operability of the system. Furthermore, the cutting state in micro-cutting is reflected as force feedback to the master joystick using a newly introduced index which represents the cutting state. The MMM (micro-machining machine) located at the University of Tokyo was operated from Karlsruhe University in Germany using ISDN. The cutting force in the micro-world using micro-endmill is analyzed and compared with that in the macro-world. The dependency of the crystal direction while scratching a single crystal silicon was analyzed. Finally, the internal damage while scratching a single crystal magnesium oxide was observed in real-time and analyzed.

Paper Details

Date Published: 11 December 1996
PDF: 12 pages
Proc. SPIE 2906, Microrobotics: Components and Applications, (11 December 1996); doi: 10.1117/12.260621
Show Author Affiliations
Mamoru Mitsuishi, Univ. of Tokyo (Japan)
Naohiko Sugita, Univ. of Tokyo (Japan)
Toshio Hori, Univ. of Tokyo (Japan)
Takaaki Nagao, Univ. of Tokyo (Japan)
Yotaro Hatamura, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 2906:
Microrobotics: Components and Applications
Armin Sulzmann, Editor(s)

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