This paper describes a tele-micro machining system which works under a stereo SEM and has operational environment transmission capability. The system includes a 3-axis force sensing table, the signal from which is converted into auditory information to enhance the operability of the system. Furthermore, the cutting state in micro-cutting is reflected as force feedback to the master joystick using a newly introduced index which represents the cutting state. The MMM (micro-machining machine) located at the University of Tokyo was operated from Karlsruhe University in Germany using ISDN. The cutting force in the micro-world using micro-endmill is analyzed and compared with that in the macro-world. The dependency of the crystal direction while scratching a single crystal silicon was analyzed. Finally, the internal damage while scratching a single crystal magnesium oxide was observed in real-time and analyzed.

Date Published: 11 December 1996
PDF: 12 pages
Proc. SPIE 2906, Microrobotics: Components and Applications, (11 December 1996); doi: 10.1117/12.260621

Published in SPIE Proceedings Vol. 2906:
Microrobotics: Components and Applications
Armin Sulzmann, Editor(s)