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Proceedings Paper

Measurements of gas flow and gas constituent in a wind-tunnel-type excimer laser under high-repetition-rate operations
Author(s): Koichi Kasuya; Kazuhiko Horioka; N. Hikida; M. Murazi; K. Nakata; Yasumasa Kawakita; Yoichi Miyai; S. Kato; S. Yoshida; S. Ideno
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Paper Abstract

A low speed wind tunnel type excimer laser apparatus of about 500 liter gas volume was constructed to study the critical issues concerning such kind of high repetition-rate excimer lasers. For the moment, the gas flow speed and the repetition-rate of the KrF laser was up to 50 m/s and 1 kHz, respectively. The gas flow conditions, the gas constituents and the laser output were measured with various methods to clarify the basic processes.

Paper Details

Date Published: 1 February 1991
PDF: 4 pages
Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); doi: 10.1117/12.25995
Show Author Affiliations
Koichi Kasuya, Tokyo Institute of Technology (Japan)
Kazuhiko Horioka, Tokyo Institute of Technology (Japan)
N. Hikida, Tokyo Institute of Technology (Japan)
M. Murazi, Tokyo Institute of Technology (Japan)
K. Nakata, Nissin Electric Co., Ltd. (Japan)
Yasumasa Kawakita, Nissin Electric Co., Ltd. (Japan)
Yoichi Miyai, Nissin Electric Co., Ltd. (Japan)
S. Kato, Nissin Electric Co., Ltd. (Japan)
S. Yoshida, Nissin Electric Co., Ltd. (Japan)
S. Ideno, Nissin Electric Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 1397:
8th Intl Symp on Gas Flow and Chemical Lasers
Concepcion Maroto Domingo; Jose M. Orza, Editor(s)

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