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Proceedings Paper

2.5 kHz high-repetition-rate XeCl excimer laser
Author(s): Ken Ishikawa; S. Takagi; Naomichi Okamoto; K. Kakizaki; Saburoh Satoh; Tatsumi Goto
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Paper Abstract

An XeCl excimer laser was operated at the high repetition rate of 2.5 kHz, which can circulate the laser gas up to 100 m/s uniformly and efficiently. The stable operation at the highest repetition rate, 2.5 kHz, has been attained in Ne buffer at a gas flow rate of 54 m/s with an average laser power of 87 W

Paper Details

Date Published: 1 February 1991
PDF: 4 pages
Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); doi: 10.1117/12.25986
Show Author Affiliations
Ken Ishikawa, Toshiba Corp. (Japan)
S. Takagi, Toshiba Corp. (Japan)
Naomichi Okamoto, Toshiba Corp. (Japan)
K. Kakizaki, Toshiba Corp. (Japan)
Saburoh Satoh, Toshiba Corp. (Japan)
Tatsumi Goto, Toshiba Corp. (Japan)

Published in SPIE Proceedings Vol. 1397:
8th Intl Symp on Gas Flow and Chemical Lasers
Concepcion Maroto Domingo; Jose M. Orza, Editor(s)

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