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Proceedings Paper

Industrial excimer and CO2 TEA lasers with kilowatt average output power
Author(s): Hubertus M. von Bergmann; Pieter L. Swart
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Paper Abstract

We have developed a high repetition rate high average power pulsed laser system intended for industrial applications. The system has been designed for operation as an excimer and CO2 TEA laser and is capable of continuous operation at repetition rates of up to 2 kHz. A closed loop gas recirculation system, driven by a large diameter, magnetically coupled, axial fan is employed, providing gas flow velocities of up to 90 m/s. The laser delivers maximum average output powers of more than 500 W as KrF excimer and 2.5 kW as C02 TEA laser.

Paper Details

Date Published: 1 February 1991
PDF: 4 pages
Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); doi: 10.1117/12.25939
Show Author Affiliations
Hubertus M. von Bergmann, Rand Afrikaans Univ. (South Africa)
Pieter L. Swart, Rand Afrikaans Univ. (South Africa)

Published in SPIE Proceedings Vol. 1397:
8th Intl Symp on Gas Flow and Chemical Lasers
Concepcion Maroto Domingo; Jose M. Orza, Editor(s)

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