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Proceedings Paper

Time-space resolved optical study of the plasma produced by laser ablation of Ge: the role of oxygen pressure
Author(s): Fidel Vega; J. Solis; Carmen N. Afonso Rodriguez
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Paper Abstract

Time and space resolved optical measurements of the laser induced plasma emission have been performed during the growth of Ge films in vacuum (105 mbar) and in an oxygen partial pressure up to 103 mbar. From these irteasurements,the tiite of flight spatial distribution of the plasma species as well as their average velocity is stablished. The velocity is found to be 3x106 cm/s and is not influenced by the presence of oxygen in the studied pressures interval. The lack of differences in the plasma behavior when ablation takes place in vacuum or in oxygen pressure is consistent with the low oxygen content found in the films.

Paper Details

Date Published: 1 February 1991
PDF: 5 pages
Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); doi: 10.1117/12.25922
Show Author Affiliations
Fidel Vega, Instituto de Optica (Spain)
J. Solis, Instituto de Optica (Spain)
Carmen N. Afonso Rodriguez, Instituto de Optica (Spain)

Published in SPIE Proceedings Vol. 1397:
8th Intl Symp on Gas Flow and Chemical Lasers
Concepcion Maroto Domingo; Jose M. Orza, Editor(s)

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