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Proceedings Paper

Linearity of capacitance micrometry
Author(s): Malachy McConnell; Thomas R. Hicks; Paul D. Atherton
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Paper Abstract

Capacitance micrometry is a technique for measuring the relative displacement of two surfaces. As the spacing between the two surfaces changes so the capacitance changes. This short paper is a summary of recent measurements made to characterize and understand the linearity and scale factor.

Paper Details

Date Published: 20 November 1996
PDF: 7 pages
Proc. SPIE 2865, Actuator Technology and Applications, (20 November 1996); doi: 10.1117/12.259036
Show Author Affiliations
Malachy McConnell, Queensgate Instruments Ltd. (United Kingdom)
Thomas R. Hicks, Queensgate Instruments Ltd. (United Kingdom)
Paul D. Atherton, Queensgate Instruments Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 2865:
Actuator Technology and Applications
Alson E. Hatheway, Editor(s)

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