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Proceedings Paper

Rapid thermal processing in the manufacturing technology of contacts to InP-based photonic devices
Author(s): Avishay Katz
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Paper Abstract

Rapid thermal alloying and sintering of metal ohmic contacts such as AuBe PtTFi and W to InP-based materials is shown to perform with better electrical properties than the same contacts heated by means of conventional furnace. The metalsemiconductor interfacial reactions induced by the rapid thermal processing were much shallower than those formed during the conventional heating cycle at the same temperature however with a negligible influence on the overall stresses developed in the film. These results demonstrate the superiority of the rapid thermal processing over the conventional furnace heating in sintering the metal electrical contacts and its potential while integrated into the overall manufacturing process sequence of the InP based photonic devices.

Paper Details

Date Published: 1 April 1991
PDF: 11 pages
Proc. SPIE 1393, Rapid Thermal and Related Processing Techniques, (1 April 1991); doi: 10.1117/12.25692
Show Author Affiliations
Avishay Katz, AT&T Bell Labs. (United States)

Published in SPIE Proceedings Vol. 1393:
Rapid Thermal and Related Processing Techniques
Rajendra Singh; Mehrdad M. Moslehi, Editor(s)

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