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Proceedings Paper

Optical characterization method for high-frequency gratings
Author(s): Heike Huebner; Guenter Nitzsche; Ernst-Bernhard Kley
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Paper Abstract

An optical method for the determination of high spatial frequency grating profiles with visible light is presented. The theoretical background is the effective medium theory. By using an optical surface profiler, the change of the surface height in the grating region is measured in two different ways. The results can be used to determine the duty cycle and the groove depth in the case of a binary grating profile.

Paper Details

Date Published: 1 November 1996
PDF: 10 pages
Proc. SPIE 2863, Current Developments in Optical Design and Engineering VI, (1 November 1996); doi: 10.1117/12.256223
Show Author Affiliations
Heike Huebner, Friedrich-Schiller-Univ. Jena (Germany)
Guenter Nitzsche, Friedrich-Schiller-Univ. Jena (Germany)
Ernst-Bernhard Kley, Friedrich-Schiller-Univ. Jena (Germany)

Published in SPIE Proceedings Vol. 2863:
Current Developments in Optical Design and Engineering VI
Robert E. Fischer; Warren J. Smith, Editor(s)

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