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Noise analysis of MEMS gyroscope under force rebalance closed loop detection
Author(s): Feng Bu; Bo Fan; Shuwen Guo; Dacheng Xu; Heming Zhao
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Paper Abstract

Angle Random Walk (ARW) is an important performance index of the MEMS gyroscope, which is determined by the noise in the control system. In this paper, the thermal noise of gyroscope, the noise of pickoff circuit and feedback circuit are considered, and the noise model of control system is constructed under force-to-rebalance (FTR) closed-loop detection. The influence of system parameters on the power spectral density (PSD) of noise equivalent rate (NER) is analyzed, and the noise is reduced by adjusting system parameters reasonably. Simulink numerical simulation proves the correctness of the noise model.

Paper Details

Date Published: 31 December 2019
PDF: 6 pages
Proc. SPIE 11384, Eleventh International Conference on Signal Processing Systems, 1138408 (31 December 2019); doi: 10.1117/12.2559706
Show Author Affiliations
Feng Bu, Soochow Univ. (China)
Bo Fan, Soochow Univ. (China)
Shuwen Guo, Soochow Univ. (China)
Dacheng Xu, Soochow Univ. (China)
Heming Zhao, Soochow Univ. (China)

Published in SPIE Proceedings Vol. 11384:
Eleventh International Conference on Signal Processing Systems
Kezhi Mao, Editor(s)

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