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Spacing detection method for shearing interference fringes containing speckle noises
Author(s): Shuman He; Chenguang Cai; Zhihua Liu; Ying Wang; Huichao Shi
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Paper Abstract

Due to environmental illumination and other factors, actual shearing interference image used to measure the rotation angle contains high-frequency speckle noises. According to the characteristics of shearing interference images, a low-pass filter based on homomorphic filtering principle is selected to filter these images. The desired filtering result can be achieved by adjusting the filter parameters such as the cutoff frequency radius and the order of the filter. The Hilditch thinning algorithm is applied to extract the center of the fringes to calculate the spacing between neighbor fringes. The accuracy of the algorithm is verified by the actual and simulation experiments with the error of fringe spacing detection less than 0.01%.

Paper Details

Date Published: 3 January 2020
PDF: 7 pages
Proc. SPIE 11373, Eleventh International Conference on Graphics and Image Processing (ICGIP 2019), 113730J (3 January 2020); doi: 10.1117/12.2557203
Show Author Affiliations
Shuman He, Beijing Univ. of Chemical Technology (China)
Chenguang Cai, National Institute of Metrology (China)
Zhihua Liu, National Institute of Metrology (China)
Ying Wang, Institute of Microelectronics (China)
Univ. of Chinese Academy of Sciences (China)
Huichao Shi, Beijing Univ. of Chemical Technology (China)

Published in SPIE Proceedings Vol. 11373:
Eleventh International Conference on Graphics and Image Processing (ICGIP 2019)
Zhigeng Pan; Xun Wang, Editor(s)

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