Share Email Print
cover

Proceedings Paper

Silicon based integrated hollow waveguide for gas sensing applications
Author(s): Alaa Fathy; Yasser M. Sabry; Frederic Marty; Diaa Khalil; Tarik Bourouina
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Gas sensors are crucial instruments for different industries and air quality monitoring. Micro-electro-mechanical system MEMS technology was proved as a solution for reducing the cost and size of spectrometers. Building gas cells with same technology enables the whole integration of the whole sensor. We present an HWG, as an example for integarted gas cell, which is fabricated on the silicon wafer using the MEMS technology. The HWG length is 2 cm long. The insertion loss of the HWG was measured. Carbon dioxide from exhaling and butane were measured using the HWG in conjunction with the MEMS based spectrometer. This proves the applicability of such HWG for portable gas sensors.

Paper Details

Date Published: 1 April 2020
PDF: 7 pages
Proc. SPIE 11355, Micro-Structured and Specialty Optical Fibres VI, 113550T (1 April 2020); doi: 10.1117/12.2554947
Show Author Affiliations
Alaa Fathy, Univ. Paris-Est, ESYCOM EA 2552, ESIEE Paris (France)
Si-Ware Systems (Egypt)
Yasser M. Sabry, Si-Ware Systems (Egypt)
Ain Shams Univ. (Egypt)
Frederic Marty, Univ. Paris-Est, ESYCOM EA 2552, ESIEE Paris (France)
Diaa Khalil, Si-Ware Systems (Egypt)
Ain Shams Univ. (Egypt)
Tarik Bourouina, Univ. Paris-Est, ESYCOM EA 2552, ESIEE Paris (France)
Si-Ware Systems (Egypt)


Published in SPIE Proceedings Vol. 11355:
Micro-Structured and Specialty Optical Fibres VI
Kyriacos Kalli; Pavel Peterka; Christian-Alexander Bunge, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray