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Proceedings Paper

Optimization of deep rib high speed phase modulators on 300mm industrial Si-photonics platform
Author(s): S. Monfray; S. Cremer; N. Vulliet; E. Dubois; F. Domengie ; S. Jan; F. Baille; F. Boeuf
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Paper Abstract

This paper highlights the optimization of Deep Rib High Speed Phase Modulators for 400G applications thanks to the optimal choice of structure and implants through a Design Of Experiment analysis, including the proposal of a new Deep Rib HSPM with Z-implants. Results show 1,6dB gain in OMA (Optical Modulation of Amplitude) at the same cutoff frequency (fc=[2Pi*RC]-1) compared to the previous generation [1] with optimized vertical implants, and up to 2,15dB gain vs [1] with the new Z-implant Deep Rib device.

Paper Details

Date Published: 2 April 2020
PDF: 8 pages
Proc. SPIE 11364, Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications, 1136403 (2 April 2020); doi: 10.1117/12.2554725
Show Author Affiliations
S. Monfray, STMicroelectronics (France)
S. Cremer, STMicroelectronics (France)
N. Vulliet, STMicroelectronics (France)
E. Dubois, IEMN (France)
F. Domengie , STMicroelectronics (France)
S. Jan, STMicroelectronics (France)
F. Baille, STMicroelectronics (France)
F. Boeuf, STMicroelectronics (France)

Published in SPIE Proceedings Vol. 11364:
Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications
Roel G. Baets; Peter O'Brien; Laurent Vivien, Editor(s)

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