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Proceedings Paper

Design of a phase-shifting algorithm for interferometric measurement of optical thickness variation
Author(s): Wonjun Bae; Yangjin Kim
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Paper Abstract

The optical thickness is an important property of transparent plates when fabricating critical components. Spatially nonuniform errors, which are major factors in the measurement of the absolute optical thickness, can be brought about by phase errors related to the nonlinear error term. In this study, equations and a new sampling window for suppressing spatially uniform errors were constructed. Using these equations and new sampling amplitudes, we designed a new phase-shifting algorithm with 17 samples. Herein, the characteristics and advantages to the measurement of highly reflective surfaces when applying this new 17-sample algorithm are presented based on a Fourier representation. In addition, the superiority of the new algorithm in terms of its error control is demonstrated by comparing the errors occurring from a varying object phase, as well as root mean square errors, with those from different conventional algorithms.

Paper Details

Date Published: 2 March 2020
PDF: 7 pages
Proc. SPIE 11287, Photonic Instrumentation Engineering VII, 112871I (2 March 2020); doi: 10.1117/12.2554163
Show Author Affiliations
Wonjun Bae, Pusan National Univ. (Korea, Republic of)
Yangjin Kim, Pusan National Univ. (Korea, Republic of)

Published in SPIE Proceedings Vol. 11287:
Photonic Instrumentation Engineering VII
Yakov Soskind; Lynda E. Busse, Editor(s)

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