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Proceedings Paper

Physical properties of W2N thin films deposited by reactive magnetron sputtering
Author(s): Andrii I. Mostovyi; Mykhailo M. Solovan; Pavlo D. Maryanchuk
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Paper Abstract

W2N thin films were prepared by DC reactive magnetron sputtering. The optical and electrical properties of the obtained thin films were investigated. The transmission spectra of thin films of tungsten nitride (deposited on glass substrates) were analyzed. The optical band gap is determined. The electrical resistance of the films is analyzed.

Paper Details

Date Published: 6 February 2020
PDF: 6 pages
Proc. SPIE 11369, Fourteenth International Conference on Correlation Optics, 113691J (6 February 2020);
Show Author Affiliations
Andrii I. Mostovyi, Chernivtsi National Univ. (Ukraine)
Mykhailo M. Solovan, Chernivtsi National Univ. (Ukraine)
Pavlo D. Maryanchuk, Chernivtsi National Univ. (Ukraine)

Published in SPIE Proceedings Vol. 11369:
Fourteenth International Conference on Correlation Optics
Oleg V. Angelsky, Editor(s)

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